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Volumn 177, Issue 4, 2001, Pages 298-302

Formation of β-SiC nanocrystals on Si(1 1 1) monocrystal during the HFCVD of diamond

Author keywords

Diamond; HFCVD; Si(1 1 1)

Indexed keywords

CRYSTAL ORIENTATION; DIAMONDS; EPITAXIAL GROWTH; FILM PREPARATION; HIGH RESOLUTION ELECTRON MICROSCOPY; NUCLEATION; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SILICON CARBIDE; SURFACE CHEMISTRY; TRANSMISSION ELECTRON MICROSCOPY;

EID: 0035876792     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00225-2     Document Type: Article
Times cited : (7)

References (9)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.