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Volumn 137, Issue 2-3, 2001, Pages 284-292

Influence of various nickel under-layers on the corrosion behaviour of AIN films deposited by reactive sputtering

Author keywords

Aluminium nitride; Corrosion resistance; Nickel; Reactive sputtering; Under layers

Indexed keywords

ALUMINUM NITRIDE; ATOMIC FORCE MICROSCOPY; CORROSION RESISTANCE; PHASE TRANSITIONS; SCANNING ELECTRON MICROSCOPY; SPECTROSCOPY; SUBSTRATES; SURFACE ROUGHNESS; X RAY DIFFRACTION ANALYSIS;

EID: 0035868301     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)01110-5     Document Type: Article
Times cited : (27)

References (25)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.