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Volumn 184, Issue 1-4, 2001, Pages 150-155
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Spectroscopic ellipsometry analysis of nanocrystalline silicon carbide obtained at low temperature
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Author keywords
Ellipsometry; Heterojunction diode; Nanocrystalline; Reactive sputtering; Silicon carbide
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Indexed keywords
ELLIPSOMETRY;
GRAIN SIZE AND SHAPE;
LEAKAGE CURRENTS;
LOW TEMPERATURE EFFECTS;
MAGNETRON SPUTTERING;
NANOSTRUCTURED MATERIALS;
REFRACTIVE INDEX;
SPECTROSCOPIC ANALYSIS;
SUBSTRATES;
THIN FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
HETEROJUNCTION DIODES;
SILICON CARBIDE;
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EID: 0035852199
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(01)00489-5 Document Type: Article |
Times cited : (13)
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References (24)
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