Deposition and annealing of lead scandium tantalate thin films for high performance thermal detector arrays

Integrated Ferroelectrics

Volumn 25, Issue 1-4, 1999, Pages 113-123

  Todd, Mike A ^a   Donohue, Paul P ^a   Jones, Jason C ^a   Wallis, David J ^a   Slater, Mike J ^a   Harper, Mark A ^a   Watton, Rex ^a  

^a DEFENCE SCIENCE AND TECHNOLOGY LABORATORY   (United Kingdom)

Author keywords

Annealing; Ferroelectric thin films; Lead Scandium Tantalate; Rapid thermal processing; Sputtering; Thermal detectors

Indexed keywords

FERROELECTRIC DEVICES; OXYGEN; PEROVSKITE; PHASE TRANSITIONS; PYROELECTRICITY; RAPID THERMAL ANNEALING; SEMICONDUCTING LEAD COMPOUNDS; SPUTTER DEPOSITION; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

FERROELECTRIC MICROBRIDGE THERMAL DETECTORS; LEAD SCANDIUM TANTALATE; POST DEPOSITION ANNEALING; PYROCHLORE; THERMAL DETECTOR ARRAYS;

FERROELECTRIC MATERIALS;

EID: 0033333352     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589908210165     Document Type: Article

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