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Volumn 17, Issue 5, 2001, Pages 1637-1640
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Investigation of Ta2O5 thin film evolution
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Author keywords
[No Author keywords available]
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Indexed keywords
THERMAL EVOLUTION PROCESSES;
CHEMICAL BONDS;
CHLORINATION;
COATINGS;
EVAPORATION;
FOURIER TRANSFORMS;
MASS SPECTROMETRY;
OXIDATION;
SOLIDIFICATION;
SOLVENTS;
TANTALUM COMPOUNDS;
THERMOGRAVIMETRIC ANALYSIS;
THIN FILMS;
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EID: 0035815062
PISSN: 07437463
EISSN: None
Source Type: Journal
DOI: 10.1021/la001529c Document Type: Article |
Times cited : (10)
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References (10)
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