A study on residual stress measurement using I-V characteristics of bent-beam actuators

IEEE Region 10 International Conference on Electrical and Electronic Technology

Volumn , Issue , 2001, Pages 847-849

  Lee, Soo ^a   Lee, Byeungleul ^a   Chun, Kukjin ^a  

^a Seoul National University   (South Korea)

Author keywords

Bent beam; Electrical; Piezoresistivity; Residual stress

Indexed keywords

ACTUATORS; CHEMICAL MECHANICAL POLISHING; DEFORMATION; ELASTIC MODULI; FINITE ELEMENT METHOD; POLYSILICON; THERMAL STRESS;

STRESS MEASUREMENTS;

RESIDUAL STRESSES;

EID: 0035785546     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. H. Guckel, T. Randazzo, "A simple technique for the determination of mechanical strain in thin films with application to polysilicon", J. Appl. Phys. 57(5), 1985, 1671 - 1675
2. Yogesh B. Gianchandani, "Bent-beam strain sensors", J. of Micro electro mechanical system, 1996, 52 - 58
3. M.Kirsten, B.Wenk, F. Ericson, J.A. Schweitz, W. Riethmuller, P. Lange, "Deposition of thick doped polysilicon films with low stress in an epitaxial reactor for surface mircomaching application", Thin Solid Films 259(1995), 181-187
4. M. Furtsch, M. Offenberg, A. Cornet, J,R. Morante, "Texture and stress profile in thick polysilicon films suitable for fabrication of microstructure", Thin Solid Films 296(1997), 177-180
5. H. Guckel, D. Burns, C. Rutigliano, E. Lovell, B. Choi, "Diagnostic microstructures for the measurement of intrinsic strain in thin films", J. Micromech. Microeng.2 (1992) 86-95
6. Liwei Lin, Roger T, Howe, Albert P. Pisano, "A Passive, In Situ Micro Strain Gauge", Proc. Micro Electro Mechanical Systems, 1993 201-206
7. th international conference on solid-state sensors and actuators, and Eurosensor (1995), 88-91
8. Yogesh B. Gianchandani, Meenam Shinn, Khalil Nahafi, "Impact of High-Thermal Budget Anneals on Polysilicon as a Micromechanical Material", Journal of microelectromechanical systems, vol 7, NO. 1, March 1998, 102-105