Micromachined accelerometer with microprocessor controlled self-test procedure

Sensor Review

Volumn 21, Issue 1, 2001, Pages 33-37

  Beeby, S P ^a   Grabham, N J ^a   White, N M ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

Micromachining; Microprocessors; Silicone

Indexed keywords

MICROMACHINING; MICROPROCESSOR CHIPS; NATURAL FREQUENCIES; PIEZOELECTRIC MATERIALS; SILICON SENSORS;

MICROMACHINED ACCELEROMETERS;

ACCELEROMETERS;

EID: 0035780801     PISSN: 02602288     EISSN: None     Source Type: Journal    
DOI: 10.1108/02602280110380575     Document Type: Article

References (5)

1. Beeby, S.P. and White, N.M. (2000), "Thick-film PZT-silicon micromechanical resonator", Electronics Letters, Vol. 36 No. 19, pp. 1661-2.
2. Beeby S.P., Blackburn, A. and White, N.M. (1999a), "Processing of PZT piezoelectric thick films on silicon for MicroElectroMechanical systems", J. Micromech. Microeng., Vol. 9 No. 3, pp. 218-29.
3. Beeby, S.P., Ross, J.N. and White, N.M. (1999b). "A novel thick-film PZT/micromachined silicon accelerometer", Electronioc Letters, Vol. 35 No. 23, pp. 2060-2.
4. Beeby S.P., Ross J.N. and White, N.M. (2000), "Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensors", J. Micromech. Microeng., Vol. 10 No. 3, pp. 322-9.
5. Van Mullein, C.J., Tilmans, H.A.C., Mouthaan, A.J. and Fluitman, J.H.J. (1992), "Electrical cross-talk in two-port resonators - the resonant silicon beam force sensor", Sensors and Actuators, Vol. A 31, pp. 168-73.