Improved microwave performance on low-resistivity Si substrates by introducing an oxidized porous Si interlayer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4557, Issue , 2001, Pages 447-452

  Zhu, Ziqiang ^a   Shi, Yanling ^a   Long, Yongfu ^a   Xin, Peisheng ^a   Lai, Zongsheng ^a  

^a EAST CHINA NORMAL UNIVERSITY   (China)

Author keywords

Coplanar waveguide; Microwave device; Oxidization; Porous silicon

Indexed keywords

MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; MOSFET DEVICES; PERMITTIVITY; POROUS SILICON; SILICON WAFERS; WAVEGUIDES;

ELECTROCHEMICAL DISSOLUTION;

MICROMACHINING;

EID: 0035765859     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.442977     Document Type: Conference Paper

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