The performance improvement of coplanar waveguides by silicon micromachined technology

2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings

Volumn 2, Issue , 2001, Pages 761-764

  Shi, Yanling ^a   Lai, Zongsheng ^a   Xin, Peisheng ^a   Zhu, Ziqiang ^a  

^a EAST CHINA NORMAL UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84964528088     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSICT.2001.982006     Document Type: Conference Paper

References (4)

1. R.McGrath William, Walker Christopher, Tai Yu-Chong et al. Silicon Micromachined Waveguides for Millimeter-Wave and Submillimeter-Wave Frequencies IEEE Microwave and Guided Wave Letters, 3, 61(1993)
2. Veljko Milanovic Veljko, Gaitan Michael, D.Bowen Edwin et al. Design and Fabrication of Micromachined Passive Microwave Filtering Elements in CMOS Technology, Transducers '97(1007-1010)
3. Milanvic Veljko, Gaitan Michael, D.Bowen Edwin et al. Micromachined Microwave Transmission Lines in CMOS Technology IEEE Trans. On MTT 45,630(1997)
4. Shi Yanling, Yu Dandan The Analysis of the Characteristic Impedance of Micromachined Microwave Transmission Lines with FEM ACTA ELECTRONICA SINICA, 28,12(2000)