Multi-level microstructures and mold inserts fabricated with planar and oblique x-ray lithography of SU-8 negative photoresist

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4557, Issue , 2001, Pages 69-76

  Jian, Linke ^a   Desta, Yohannes M ^a   Goettert, Jost ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

LIGA; Mold insert; Multi level microstructure; PDMS; SU 8; X ray lithography

Indexed keywords

ELECTROPLATING; INJECTION MOLDING; MICROSTRUCTURE; RAPID PROTOTYPING; X RAY LITHOGRAPHY;

EMBOSSING;

PHOTORESISTS;

EID: 0035765701     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.442979     Document Type: Conference Paper

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