Surface quality of x-ray mirrors evaluated at the advanced photon source

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4501, Issue , 2001, Pages 54-62

  Assoufid, Lahsen ^a   Khounsary, Ali ^a   Qian, Jun ^a   Macrander, Albert ^a   Mills, Dennis ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

Metrology; Roughness; Slope error; Surface figure; Surface slope error; Synchrotron radiation; X ray mirrors

Indexed keywords

MEASUREMENT ERRORS; MIRRORS; PROFILOMETRY; SURFACE ROUGHNESS; SYNCHROTRON RADIATION;

NONCONTACT SURFACE PROFILOMETRY; SURFACE QUALITY; X RAY MIRRORS;

X RAY OPTICS;

EID: 0035765664     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.448498     Document Type: Conference Paper

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