Metrology of a mirror at the Advanced Photon Source: Comparison between optical and x-ray measurements

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3447, Issue , 1998, Pages 109-116

  Assoufid, Lahsen ^a   Lang, Jonathan ^a   Wang, Jin ^a   Srajer, George ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

Long trace profiler; Metrology; Synchrotron radiation; X ray mirror

Indexed keywords

ERROR ANALYSIS; MAGNETS; PHOTONS; PROFILOMETRY; SYNCHROTRON RADIATION; X RAYS;

LONG TRACE PROFILERS (LTP);

MIRRORS;

EID: 0032224658     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.331123     Document Type: Conference Paper

References (6)

1. The advanced photon source metrology laboratory
2. Design of a long-trace profiler
3. Long trace profiler measurement repeatability improvements
4. Incoherent x-ray mirror surface metrology