Silicon three-axial tactile probe for mechanical characterization of micro grippers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4568, Issue , 2001, Pages 61-67

  Bütefisch, Sebastian ^a   Wilke, Ralph ^a   Büttgenbach, Stephanus ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

Dimensional metrology; Micro gripper; Micro probe; Silicon

Indexed keywords

ACTUATORS; INDUSTRIAL ROBOTS; MICROMACHINING; SHAPE MEMORY EFFECT; SILICON;

MICRO GRIPPERS;

GRIPPERS;

EID: 0035763829     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.444145     Document Type: Conference Paper

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