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Volumn , Issue , 2000, Pages
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Development of a micro-isolation valve: Minimum energy requirements, repeatability of actuation, and preliminary studies of debris generation
a,b a,c a,c a,d a,e f |
Author keywords
[No Author keywords available]
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Indexed keywords
COMB FILTERS;
FLOW RATE;
MICROFABRICATION;
SILICON;
TINNING;
CAPACITIVE DISCHARGES;
DEBRIS GENERATION;
FLOW RATE MEASUREMENTS;
INTERPLANETARY MISSION;
ISOLATION VALVES;
OPERATING CONDITION;
RESISTIVE HEATING;
SILICON-BASED DEVICES;
PROPULSION;
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EID: 84896474748
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (3)
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References (5)
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