Development of sub-micrometer resolution x-ray CT system at SPring-8

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4503, Issue , 2001, Pages 291-298

  Uesugi, Kentaro ^a   Suzuki, Yoshio ^a   Yagi, Naoto ^a   Tsuchiyama, Akira ^b   Nakano, Tsukasa ^c  

^a JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE   (Japan)

^b OSAKA UNIVERSITY   (Japan)

^c GEOLOGICAL SURVEY OF JAPAN   (Japan)

Author keywords

Computed tomography; Sub micrometer; Synchrotron radiation; Three dimensional

Indexed keywords

ALLOYS; EUTECTICS; IMAGE COMMUNICATION SYSTEMS; IMAGE RECONSTRUCTION; MONOCHROMATORS; NITROGEN; SILICON; SYNCHROTRON RADIATION; X RAYS;

SPATIAL RESOLUTION; SUB-MICROMETER RESOLUTION;

COMPUTERIZED TOMOGRAPHY;

EID: 0035762439     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.452855     Document Type: Article

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