Phase shifting AFM Moiré method

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4448, Issue , 2001, Pages 102-110

  Asundi, Anand ^a   Xie, Huimin ^a   Yu, Jin ^a   Zhaowei, Zhong ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

AFM scanning moir method; Deformation; Electronic package; High frequency grating; Phase shifting technique

Indexed keywords

ALGORITHMS; ATOMIC FORCE MICROSCOPY; DEFORMATION; DIFFRACTION GRATINGS; ELECTRONICS PACKAGING; HOLOGRAPHIC OPTICAL ELEMENTS; PHASE SHIFTERS; SCANNING; THERMAL EFFECTS;

HOLOGRAPHIC GRATINGS; PHASE DISTRIBUTION; PHASE SHIFTING ATOMIC FORCE MICROSCOPY MOIRE METHOD; PIEZO-SCANNER; THERMAL DEFORMATION;

MOIRE FRINGES;

EID: 0035761278     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.449366     Document Type: Conference Paper

References (4)

1. H. Chen, D. Liu and A. Lee, "Moiré in Atomic Force Microscope", Experimental Techniques, 24(1), pp31-32, 2000.
2. H. Xie, S. Kishimoto, A. Asundi, G.B. Chai, N. Shinya, J. Yu, B.K.A. Ngoi, "In-plane Deformation Measurement Using the Atomic Force Microscope Moiré Method", Nanotechnology, 11(1), pp24-29, 2000.
3. F.-P. Chiang, Moiré Methods of Strain Analysis, Chap. 7, Manual on Experimental Stress Analysis, 5th Edition, J. F. Doyle and J. W. Philips, Editors, Society for Exp. Mech., Bethel, Connecticut, 1989.
4. J.M. Huntely, "Automatic Fringe Pattern Analysis in Experimental Mechanics: a Review, Journal of Strain Analysis," 33(2), pp105-125, 1998.