Wet-etch figuring: Optical surfacing by controlled application of etchant solution using the Marangoni effect

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4451, Issue , 2001, Pages 249-258

  Rushford, M C ^a   Britten, J A ^a   Hoaglan, C R ^a   Thomas, I M ^a   Summers, L J ^a   Dixit, S N ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

Aspheric; Interferometry; Marangoni; Phase correction; Phase mask; Polishing; Small tool figuring; Surface tension; Surfacing; Wet etching

Indexed keywords

ETCHING; INTERFEROMETRY; POLYNOMIALS; SOLUTIONS; SURFACE TENSION; SURFACE TREATMENT; THERMAL STRESS; THICKNESS MEASUREMENT; WETTING;

MARANGONI EFFECT; OPTICAL SURFACES; WET ETCHING; ZERNIKE POLYNOMIALS;

OPTICAL TESTING;

EID: 0035761252     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.453623     Document Type: Conference Paper

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