Radial shearing interferometer for in-process measurement of diamond turning

Optical Engineering

Volumn 39, Issue 10, 2000, Pages 2696-2699

  Kohno, Tsuguo ^a   Matsumoto, Daiji ^b   Yazawa, Takanori ^c   Uda, Yutaka ^b  

^a TOKYO METROPOLITAN UNIVERSITY   (Japan)

^b NIKON CORPORATION   (Japan)

^c NIIGATA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND CUTTING TOOLS; MIRRORS; SURFACE MEASUREMENT; TURNING;

DIAMOND TURNING MEASUREMENT; ON-MACHINE MEASUREMENT; RADIAL SHEARING INTERFERENCE;

INTERFEROMETERS;

EID: 0034295219     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1290463     Document Type: Article

References (6)

1. T. Kohno, Y. Okazaki, N. Ozawa, K. Mitsui, and M. Omoda, "Inprocess measurement and a Workpiece-referred form accuracy control system (WORFAC)," Precis. Eng. 11(1), 9-14 (1989).
2. T. Kohno and S. Tanaka, "Figure measurement of concave mirror by fiber-grating Hartmann test," Opt. Rev. 1(1), 118-120 (1994).
3. D. Malacara, "Radial, rotational and reversal shear interferometers," in Optical Shop Testing, D. Malacara, Ed., pp. 149-166, Wiley, New York (1978).
4. T. Nomura, K. Kamiya, H. Miyashiro, S. Okuda, H. Tashiro, and K. Yoshikawa, "Shape measurements of mirror surfaces with a lateral-shearing interferometer during machine running," Precis. Eng. 22(4), 185-189 (1998).
5. J. C. Fouere and D. Malacara, "Holographic radial shear interferometer," Appl. Opt. 13(9), 2035-2039 (1974).
6. M. Takeda, H. Ina, and S. Kobayashi, "Fourier transform method of fringe-pattern analysis for computer-based topography and interferometry," J. Opt. Soc. Am. 72(1), 156 (1982).