Application of SLMs for optical metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4457, Issue , 2001, Pages 72-81

  Tiziani, H J ^a   Haist, T ^a   Liesener, J ^a   Reicherter, M ^a   Seifert, L ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Adaptive illumination; Defect analysis; Hartmann sensor; Holographic compensation adaptive microlenses; LCD; Self filtering; Spatial light modulators; Triangulation; Wavefront analysis

Indexed keywords

ABERRATIONS; HOLOGRAMS; LIQUID CRYSTALS; MICROELECTROMECHANICAL DEVICES; OPTICAL FILTERS; OPTICAL INSTRUMENT LENSES; OPTICAL SENSORS; OPTICAL SYSTEMS; OPTICAL VARIABLES MEASUREMENT; PHASE MODULATION; TRIANGULATION; WAVEFRONTS;

ABERRATED OPTICAL SYSTEMS; COMPENSATION HOLOGRAMS; HARTMANN SENSORS; MICROLENS ARRAYS; OPTICAL FILTERING; OPTICAL METROLOGY; WAVEFRONT SENSING;

LIGHT MODULATORS;

EID: 0035760740     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.447740     Document Type: Conference Paper

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