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Applied Optics
Volumn 37, Issue 4, 1998, Pages 676-682
Testing of refractive silicon microlenses by use of a lateral shearing interferometer in transmission
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EID: 0000260268     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.37.000676     Document Type: Article
Times cited : (24)
References (8)
  • 1
    • 84975664464 scopus 로고
    • Technique for monolithic fabrication of microlens arrays
    • Z. D. Popovic, R. A. Sprague, and G. A. N. Connell, “Technique for monolithic fabrication of microlens arrays, ” Appl. Opt. 27, 1281-1284 (1988).
    • (1988) Appl. Opt , vol.27 , pp. 1281-1284
    • Popovic, Z.D.1    Sprague, R.A.2    Connell, G.A.N.3
  • 2
    • 0025471413 scopus 로고
    • The manufacture of microlenses by melting photoresist
    • D. Daly, R. F. Stevens, M. C. Hutley, and N. Davies, “The manufacture of microlenses by melting photoresist, ” Meas. Sci. Technol. 1, 759-766 (1990).
    • (1990) Meas. Sci. Technol , vol.1 , pp. 759-766
    • Daly, D.1    Stevens, R.F.2    Hutley, M.C.3    Davies, N.4
  • 3
    • 0000611140 scopus 로고    scopus 로고
    • Wave-front analysis with high accuracy by use of a double-grating lateral shearing interferometer
    • G. W. R. Leibbrandt, G. Harbers, and P. J. Kunst, “Wave-front analysis with high accuracy by use of a double-grating lateral shearing interferometer, ” Appl. Opt. 31, 6151-6161 (1996).
    • (1996) Appl. Opt , vol.31 , pp. 6151-6161
    • Leibbrandt, G.W.R.1    Harbers, G.2    Kunst, P.J.3
  • 4
    • 0141783230 scopus 로고    scopus 로고
    • Technique for monolithic fabrication of silicon microlenses with selectable rim angles
    • L. Erdmann and D. Efferenn, “Technique for monolithic fabrication of silicon microlenses with selectable rim angles, ” Opt. Eng. 36, 1094-1098 (1997).
    • (1997) Opt. Eng , vol.36 , pp. 1094-1098
    • Erdmann, L.1    Efferenn, D.2
  • 5
    • 0028493889 scopus 로고
    • Characterization of microlenses using a phase shifting shearing interferometer
    • H. Sickinger, O. Falkenstorfer, N. Lindlein, and J. Schwider, “Characterization of microlenses using a phase shifting shearing interferometer, ” Opt. Eng. 33, 2680-2686 (1994).
    • (1994) Opt. Eng , vol.33 , pp. 2680-2686
    • Sickinger, H.1    Falkenstorfer, O.2    Lindlein, N.3    Schwider, J.4
  • 6
    • 0000418355 scopus 로고
    • Modal estimation of a wave front from difference measurements using the discrete Fourier transform
    • K. R. Freischlad and C. L. Koliopoulos, “Modal estimation of a wave front from difference measurements using the discrete Fourier transform, ” J. Opt. Soc. Am. A3, 1852-1861 (1986).
    • (1986) J. Opt. Soc. Am. A , vol.3 , pp. 1852-1861
    • Freischlad, K.R.1    Koliopoulos, C.L.2
  • 7
    • 0003304275 scopus 로고
    • Lateral shearing interferometers
    • D. Malacara, ed, Wiley, New York
    • M. V. R. K. Murty, “Lateral shearing interferometers, ” in Optical Shop Testing, D. Malacara, ed. (Wiley, New York, 1978), pp. 105-148.
    • (1978) Optical Shop Testing , pp. 105-148
    • Murty, M.V.R.K.1
  • 8
    • 0003972070 scopus 로고
    • 6th ed. (Pergamon, Oxford
    • M. Born and E. Wolf, Principles of Optics, 6th ed. (Pergamon, Oxford, 1986), pp. 464-466.
    • (1986) Principles of Optics , pp. 464-466
    • Born, M.1    Wolf, E.2

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.