Fast 3D measurement method for multi-beam confocal system and system error calibrating

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4222, Issue , 2000, Pages 214-218

  Kong, Bing ^a   Wang, Zhao ^a   Tan, Yushan ^a   Mi, Ning ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; CURVE FITTING; ERROR CORRECTION; INTERPOLATION; PROFILOMETRY; SURFACE MEASUREMENT; SYSTEMATIC ERRORS; THREE DIMENSIONAL;

CONICOID FITTING; ERROR CALIBRATION; MULTI BEAM CONFOCAL SYSTEM;

OPTICAL SYSTEMS;

EID: 0034462672     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.403877     Document Type: Conference Paper

References (4)