Absolute optical path difference measurement with angstrom accuracy over ranges of millimetres

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4398, Issue , 2001, Pages 116-126

  Krieg, Max L ^a   Klaver, Rene G ^a   Braat, Joseph J M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Absolute interferometry; Frequency modulation; Heterodyning; Interferometry; Mirror figure measurements

Indexed keywords

FREQUENCY MODULATION; HETERODYNING; INTERFEROMETRY; LITHOGRAPHY; MIRRORS; OPTICAL RESOLVING POWER; SCANNING; SEMICONDUCTOR LASERS;

EXTREME UV (EUV) PROJECTION SYSTEMS; OPTICAL PATH DIFFERENCE;

PROJECTION SYSTEMS;

EID: 0035758658     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.445541     Document Type: Conference Paper

References (21)

1. R.G. Klaver, H. van Brug, J.J.M. Braat, "Interferometer for measuring the form figure of aspherical mirrors as used in EUV lithography", Proc. of the SPIE. vol 3823, pp.123-132, 1999.
2. R.G. Klaver, L.M. Krieg, J.J.M. Braat, "Measuring absolute optical path differences with angstrom accuracy over ranges of millimetres" Proc. of Annual Symp. Of The IEEE/LEOS Benelux Chapter, pp.91-94, 2000.
3. T.E. Jewell, K.P. Thompson, J.M. Rodgers, "Reflective Optical Designs for Soft X-ray Projection Lithography", Proc. of the SPIE, vol. 1527, pp. 163-173, 1991.
4. N. Bobroff, "Residual errors in laser interferometry from air turbulence and nonlinearity," Appl. Opt., vol. 26, pp. 2676-2682, 1987.
5. A.E. Rosenbluth and N. Bobroff, "Optical sources of non-linearity in heterodyne interferometers," Prec. Eng., vol. 12, pp. 7-11, 1990.
6. W. Hou and G. Wilkening, "Investigation and compensation of the nonlinearity of heterodyne interferometers," Prec. Eng., vol. 14, pp. 91-98, 1992.
7. J.M. de Freitas and M.A. Player, "Polarization effects in heterodyne interferometry," J. Modern Opt., vol. 42, pp. 1875-1899, 1995.
8. C. Wu and C. Su, "Nonlinearity in measurements of length by optical interferometry," Meas. Sci. Technol., vol. 7, pp. 62-68, 1996.
9. H. Haitjema, "Dynamic probe calibration in the μm region with nanometric accuracy," Prec. Eng., vol. 19, pp. 98-104, 1996.
10. J.E. Greivenkamp and J.H. Bruning, "Phase Shifting Interferometers," in Optical Shop Testing, D. Malacara, ed., 2nd ed., Wiley, New York, 1992.
11. E. Zimmermann, Y. Salvadé, and R. Dändliker, "Stabilized Three-Wavelength Source Calibrated by Electronic Means for High-Accuracy Absolute Distance Measurement," Opt. Lett., vol. 21, pp. 531-533, 1996.
12. Y. Salvadé and R. Dändliker, "Limitations of interferometry due to the flicker noise of laser diodes," J. Opt. Soc. Am. A, vol. 17, pp. 927-932, 2000.
13. D. Uttam and B. Culshaw, "Precision Time Domain Reflectometry in Optical Fiber Systems Using a Frequency Modulated Continuous Wave Ranging Technique," J. Lightwave Technol., vol. 3, pp. 971-977, 1985.
14. H. Kikuta, K. Iwata, and R. Nagata, "Distance Measurement by the Wavelength Shift of Laser Diode Light," Appl. Opt., vol. 25, pp. 2976-2980, 1986.
15. G. Economou and R.C. Youngquist, "Limitations and Noise in Interferometric Systems Using Frequency Ramped Single Mode Diode Laser," J. Lightwave Technol., vol. 4, pp. 1601-1608, 1986.
16. H. Kikuta, K. Iwata, and R. Nagata, "Absolute Distance Measurement By Wavelength Shift Interferometry with a Laser Diode: Some Systematic Error Sources," Appl. Opt., vol. 26, pp. 1654-1660, 1987.
17. A.J. den Boef, "Interferometric Laser Rangefinder Using a Frequency Modulated Diode Laser," Appl. Opt., vol. 26, pp. 4545-4550, 1987.
18. R. Escalona and G. Tribillon, "Détermination de Distances Absolues par Détection Coherente Utilisant une Diode Laser Modulée en Fréquence," J. Opt., vol. 22, pp. 11-15, 1991.
19. E. Fischer, E. Dalhoff, S. Heim, U. Hofbauer, and H.J. Tiziani, "Absolute Interferometric Distance Measurement Using a FM-Demodulation Technique," Appl. Opt., vol. 34, pp. 5589-5594, 1995.
20. A. Hafidi, P. Pffeifer, and P. Meyrueis, "Tuneable laser diode for absolute distance measurement," Proc. of the SPIE, vol. 3478, pp. 339-343, 1998.
21. U. Minoni, L. Rovati, and F. Docchio, "Absolute distance meter based on a frequency-modulated laser diode," Rev. Sci. Instrum., vol. 69, pp. 3992-3995, 1998.