Thin membranes obtained by surface micromachining-preliminary study for a fabry-perot interferometer

Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 2001, Pages 193-196

  Muller, Raluca ^a   Manea, Elena ^a   Kusko, Mihai ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

FABRY-PEROT INTERFEROMETERS; MICROMACHINING; POLYSILICON; SENSORS; SILICA; SILICON NITRIDE; THICKNESS MEASUREMENT;

FABEY-PEROT MICROCAVITY; OPTO MECHANICAL PRESSURE SENSOR;

MICROELECTRONIC PROCESSING;

EID: 0035743848     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Megahertz optomechanical modulator
2. Micromachined Fabry-Perot cavity pressure transducer
3. Fabry-Perot cavity chemical sensors by silicon micromachining techniques
4. Reflective duplexer based on silicon micromechanics for fiber-optic communication
5. Fabrication of a mechanical antireflection switch for fiber-to-the-home systems
6. Silicon dioxide sacrificial layer etching in surface micromachining