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Journal of Materials Research

Volumn 16, Issue 12, 2001, Pages 3423-3429

Lubricity of zinc oxide thin films: Study of deposition parameters and Si as an additive

(2) Nainaparampil, J J a Zabinski, J S b

a WRIGHT PATTERSON AIR FORCE BASE (United States)

b AIR FORCE RESEARCH LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADDITIVES; CRYSTAL LATTICES; CRYSTAL MICROSTRUCTURE; CRYSTALLIZATION; FRICTION; LASER ABLATION; MAGNETRON SPUTTERING; PARTIAL PRESSURE; PULSED LASER APPLICATIONS; SEMICONDUCTOR DOPING; SILICON; SPUTTER DEPOSITION; STOICHIOMETRY; SUBSTITUTION REACTIONS; THIN FILMS; TRIBOLOGY;

HIGH TEMPERATURE LUBRICANTS;

ZINC OXIDE;

EID: 0035739176 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.2001.0471 Document Type: Article

Times cited : (5)

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