Thin film PZT pressure/temperature sensory arrays for on-line monitoring of injection molding

IECON Proceedings (Industrial Electronics Conference)

Volumn 3, Issue , 2001, Pages 375-380

  Luo, Ren C ^a   Tsai, Chih Shan ^a  

^a NATIONAL CHUNG CHENG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ARRAYS; FABRICATION; INJECTION MOLDING; LEAD COMPOUNDS; MAGNETRON SPUTTERING; PRESSURE; SUBSTRATES; TEMPERATURE; THERMOCOUPLES; THIN FILMS;

PRESSURE SENSORY ARRAYS; RADIO FREQUENCY MAGNETRON SPUTTERING; RESISTANCE TEMPERATURE DETECTOR; STEEL MASK; TEMPERATURE SENSORY ARRAYS;

MICROSENSORS;

EID: 0035695274     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. A process monitoring and control system for injection molding using nozzle-based pressure and temperature sensors
2. Three critical measurements on injection molding processes
3. MEMS based thin film pressure temperature sensor for on-line monitoring injection molding
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5. Fatigue and retention behaviors of Pt-PZT-metal capacitors with various
6. RF-magnetron sputtering of piezoelectric lead-zirconate-titanate actuator films using composite targets
7. PZT thin film preparation on Pt/Ti electrode by RF magnetron sputtering
8. Properties of sol-gel-derived lead zirconate titanate (PZT) thin films on platinum-coated silicon substrates, Ferroelectrics
9. Thin film platinum for appliance temperature control
10. Microelectronics, 1997
11. PZT thin film pressure sensor for on-line monitoring injection molding