Properties of sol-gel-derived lead zirconate titanate (PZT) thin films on platinum-coated silicon substrates

IEEE International Symposium on Applications of Ferroelectrics

Volumn 1, Issue , 1996, Pages 511-514

  Xu, Fei ^a   Trolier McKinstry, Susan ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL MICROSTRUCTURE; CRYSTALLIZATION; DIELECTRIC PROPERTIES OF SOLIDS; FERROELECTRIC MATERIALS; FILM PREPARATION; INTERFEROMETERS; PHASE COMPOSITION; SCANNING ELECTRON MICROSCOPY; SOL-GELS; SUBSTRATES;

LEAD ZIRCONATE TITANATE (PZT); PRECURSOR COMPOUNDS;

THIN FILMS;

EID: 0030373423     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)