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Volumn 3, Issue , 2001, Pages 259-266

Systems of digital data acquisition and processing in the diagnostics of semiconductors

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; BACKSCATTERING; COMPOSITION EFFECTS; COMPUTER SOFTWARE; DATA ACQUISITION; DEFECTS; DIGITAL SIGNAL PROCESSING; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ELECTRONS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICE TESTING;

EID: 0035687455     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (1)

References (30)
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    • The method of increasing COMPO contrast by linearization of backscattering characteristic η=f(Z)
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    • Kaczmarek, D.1
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    • (1997) Opt. Appl. , vol.27 , Issue.3 , pp. 161-171
    • Kaczmarek, D.1
  • 16
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    • Investigation of surface topography using the multidetector system in SEM
    • (2001) Vacuum , vol.62 , Issue.2-3 , pp. 303-308
    • Kaczmarek, D.1
  • 28
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    • The use of a computer controlled back scattered electron detector for quantitative microanalysis and imaging
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.