LIGA and alternative techniques for microoptical components

Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 1997, Pages 149-152

  Moldovan, N ^a   Ilie, M ^a   Dumbravescu, N ^a   Danila, M ^a   Vitriuc, A ^a   Sindile, P ^a   Mohr, J ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; MICROMACHINING; SEMICONDUCTOR DEVICE MANUFACTURE; THERMOPLASTICS;

MICROFABRICATION; MICROOPTICAL COMPONENTS;

OPTICAL INSTRUMENT LENSES;

EID: 0030635360     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)