Multivacancies trapping hydrogen molecules

Physica B: Condensed Matter

Volumn 308-310, Issue , 2001, Pages 171-173

  Mori, T ^a   Otsuka, K ^a   Umehara, N ^a   Ishioka, K ^b   Kitajima, M ^b   Hishita, S ^b   Murakami, K ^a  

^a UNIVERSITY OF TSUKUBA   (Japan)

^b NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Annealing; Hydrogen molecule; Multi vacancy; Si H

Indexed keywords

ANNEALING; CHEMICAL BONDS; HYDROGENATION; ION IMPLANTATION; MOLECULAR VIBRATIONS; SEMICONDUCTING SILICON; THERMODYNAMIC STABILITY;

MOLECULE TRAPPING; MULTIVACANCIES;

HYDROGEN;

EID: 0035677766     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-4526(01)00683-4     Document Type: Article

References (14)