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Materials Science Forum

Volumn 382, Issue , 2001, Pages 69-79

Radio frequency discharge with dust particles

(5) Chutov, Yu I a Goedheer, W J a Kravchenko, O Yu a Zuz, V M a Yan, M a

a TARAS SHEVCHENKO NATIONAL UNIVERSITY OF KYIV (Ukraine)

Author keywords

Dusty plasmas; RF plasma simulation; RF plasmas

Indexed keywords

COMPUTER SIMULATION; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; PLASMA ETCHING; PLASMA SHEATHS;

RADIO FREQUENCY DISCHARGES;

PLASMA SOURCES;

EID: 0035673625 PISSN: 02555476 EISSN: 16629752 Source Type: Book Series
DOI: None Document Type: Conference Paper

Times cited : (4)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.