Modeling of ionization of argon in an analytical capacitively coupled radio-frequency glow discharge

Journal of Applied Physics

Volumn 86, Issue 6, 1999, Pages 2990-3001

  Bogaerts, Annemie ^a   Yan, Min ^a   Gijbels, Renaat ^a   Goedheer, Wim ^b  

^a UNIVERSITY OF ANTWERP   (Belgium)

^b FOM INSTITUTE FOR PLASMA PHYSICS RIJNHUIZEN   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000835608     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371159     Document Type: Article

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