|
Volumn 2, Issue , 2001, Pages 772-773
|
Dark current reduction in fused InGaAs/Si avalanche photodiode
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ANNEALING;
AVALANCHE DIODES;
CURRENT VOLTAGE CHARACTERISTICS;
ELECTRODES;
MASKS;
PHOTORESISTS;
POLYIMIDES;
SEMICONDUCTING INDIUM COMPOUNDS;
SEMICONDUCTING SILICON;
SUBSTRATES;
AVALANCHE PHOTODIODES (APD);
PHOTODIODES;
|
EID: 0035656570
PISSN: 10928081
EISSN: None
Source Type: Journal
DOI: 10.1109/LEOS.2001.969043 Document Type: Article |
Times cited : (8)
|
References (5)
|