Sub-0.1-μm NMOSFET with 12-nm n+-p Junction Using 5-keV As+2 Ion Implantation

Journal of the Korean Physical Society

Volumn 39, Issue 1, 2001, Pages 72-75

  Choi, Byung Yong ^a   Nam, In Ho ^a   Lee, Jong Duk ^a   Park, Byung Gook ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035638924     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)

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