Preparation and Characterization of Low Dielectric Methyl Silsesquioxane (MSSQ) Thin Films

Journal of the Korean Physical Society

Volumn 39, Issue 1, 2001, Pages 119-122

  Kim, Kwang Hun ^a   Lee, Dong Jun ^a   Rhee, Hee Woo ^a   Char, Kookheon ^b   Yoon, Do Y ^b   Choi, Jong Sun ^c  

^a Sogang University   (South Korea)

^b Seoul National University   (South Korea)

^c Hong Ik University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035630342     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)

1. The National Technology Roadmap for Semiconductors, Semiconductor Industry Association, San Jose, CA (1997).
2. R. R. Tummala, R. W. Keyes, W. D. Grobman and S. Kapur, Microelectronics Packaging Handbook (Eds. Rao R. Tummala and Eugene J. Rymaszewski), Van Nostrand Reinhold, Chapman & Hall, New York, USA, 1997), Chapter 9, p. 673.
3. L. J. Chen, S. C. Chang and C. M. Wang, 1997 VMIC Conference, ISMIC-107/97/0125(c) (1997).
4. K. Numata, T. R. Shera, S. P. Jeng and T. Tanaka, Mater. Res. Soc. Symp. Proc. 381, 255 (1995).
5. N. P. Hacker, G. Davis, L. Figge, T. Krajewski, S. Lefferts, J. Nedbal and R. Spear, Mater. Res. Soc. Symp. Proc. 476, 25 (1997); G. Sugnhara, N. Aoi, M. Kubo, K. Arai and K. Sawada, 1997 DUMIC Conference, ISMIC- 222D/97/0019 (1997).
6. N. P. Hacker, G. Davis, L. Figge, T. Krajewski, S. Lefferts, J. Nedbal and R. Spear, Mater. Res. Soc. Symp. Proc. 476, 25 (1997); G. Sugnhara, N. Aoi, M. Kubo, K. Arai and K. Sawada, 1997 DUMIC Conference, ISMIC-222D/97/0019 (1997).
7. J. F. Remenar, C. J. Hawker, J. L. Hedrick, S. M. Kim, R. D. Miller, C. Nguyen, M. Trollsas and Do Y. Yoon, Mat. Res. Symp. Proc. 511, 69 (1998).
8. W. Jo, D. C. Kim, H. M. Lee and K. Y. Kim, J. Korean Phys. Soc. 34, 61 (1999).
9. Bok-Hee Lee, J. Korean Phys. Soc. 34, 248 (1999).