Electroluminescence from Au/Si/SiO2/p-Si structure

Materials Science in Semiconductor Processing

Volumn 4, Issue 6, 2001, Pages 661-663

  Ma, S Y ^a,b   Wang, Q Z ^a   Wang, Y Y ^b   Liu, X Q ^b  

^a NORTHWEST NORMAL UNIVERSITY   (China)

^b LANZHOU UNIVERSITY   (China)

Author keywords

Electroluminescence; Magnetron sputtering; Si SiO2 film

Indexed keywords

ELECTROLUMINESCENCE; FILM GROWTH; MAGNETRON SPUTTERING; SEMICONDUCTING SILICON; SILICA; SPECTRUM ANALYSIS;

FILM THICKNESS;

SEMICONDUCTING FILMS;

EID: 0035574215     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-8001(02)00038-0     Document Type: Conference Paper

References (7)