IR-VUV dielectric function of Al1-xInxN determined by spectroscopic ellipsometry

Materials Research Society Symposium - Proceedings

Volumn 639, Issue , 2001, Pages

  Kasic, A ^a   Schubert, M ^a   Rheinlander B ^a   Off, J ^a   Scholz, F ^a   Herzinger, C M ^a  

^a UNIVERSITY OF LEIPZIG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC PROPERTIES; ELLIPSOMETRY; FILM GROWTH; GALLIUM NITRIDE; INFRARED SPECTROSCOPY; LATTICE VIBRATIONS; METALLORGANIC VAPOR PHASE EPITAXY; OPTICAL PROPERTIES; PHONONS; STRAIN; SUBSTRATES; THIN FILMS;

ALUMINUM INDIUM NITRIDE; SPECTROSCOPIC ELLIPSOMETRY; STRAINED HEXAGONAL BUFFER LAYER;

SEMICONDUCTING ALUMINUM COMPOUNDS;

EID: 0035558827     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)