Nucleation-control and enhancement of solid-phase-crystallization of SiGe-heterostructure

Materials Research Society Symposium - Proceedings

Volumn 638, Issue , 2001, Pages

  Yamaguchi, S ^a   Park, S K ^a   Sugii, N ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLIZATION; FREE ENERGY; INTERFACES (MATERIALS); NUCLEATION; QUARTZ; SEMICONDUCTING GERMANIUM; SUBSTRATES;

NUCLEATION CONTROL;

HETEROJUNCTIONS;

EID: 0035558339     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)