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Volumn 39, Issue 4 B, 2000, Pages 2054-2057
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Optical investigations of solid-phase crystallization of Si1-xGex
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Author keywords
Defect; Ellipsometry; Germanium; Silicon; Solid phase crystallization
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Indexed keywords
ACTIVATION ENERGY;
AMORPHOUS MATERIALS;
ANNEALING;
CRYSTALLIZATION;
ELLIPSOMETRY;
ION IMPLANTATION;
LATTICE CONSTANTS;
MOLECULAR BEAM EPITAXY;
SINGLE CRYSTALS;
SPECTROSCOPY;
CRYSTAL QUALITY;
SOLID PHASE CRYSTALLIZATION;
SEMICONDUCTING SILICON COMPOUNDS;
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EID: 0033706510
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.39.2054 Document Type: Article |
Times cited : (5)
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References (12)
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