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Volumn 39, Issue 4 B, 2000, Pages 2054-2057

Optical investigations of solid-phase crystallization of Si1-xGex

Author keywords

Defect; Ellipsometry; Germanium; Silicon; Solid phase crystallization

Indexed keywords

ACTIVATION ENERGY; AMORPHOUS MATERIALS; ANNEALING; CRYSTALLIZATION; ELLIPSOMETRY; ION IMPLANTATION; LATTICE CONSTANTS; MOLECULAR BEAM EPITAXY; SINGLE CRYSTALS; SPECTROSCOPY;

EID: 0033706510     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.2054     Document Type: Article
Times cited : (5)

References (12)
  • 9
    • 33645043926 scopus 로고    scopus 로고
    • The Monte-Carlo simulations of ion-implantation are carried out using the program TRIM J. F. Ziegler and J. P. Biersack: Pergamon Press, New York, (1985)
    • The Monte-Carlo simulations of ion-implantation are carried out using the program TRIM by J. F. Ziegler and J. P. Biersack: Pergamon Press, New York, (1985).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.