STM characterization of Cu thin films grown by direct ion deposition

Materials Research Society Symposium - Proceedings

Volumn 648, Issue , 2001, Pages

  Pomeroy, Joshua M ^a   Couture, Aaron ^a   Jacobsen, Joachim ^a   Hill, Colin C ^a   Sethna, James P ^a   Cooper, Barbara H ^a   Brock, Joel D ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COPPER; EPITAXIAL GROWTH; FILM GROWTH; ION BEAM ASSISTED DEPOSITION; KINETIC ENERGY; MOLECULAR DYNAMICS; MONTE CARLO METHODS; SURFACE ROUGHNESS;

DIRECT ION DEPOSITIONS; HOMOEPITAXIAL FILMS;

THIN FILMS;

EID: 0035557533     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)