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Volumn 528, Issue , 1998, Pages 179-193
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Effect of deposition method on growth morphology - comparison of molecular beam epitaxy, ion beam assisted deposition and sputter deposition
a
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL ATOMIC STRUCTURE;
FILM GROWTH;
ION BEAMS;
MOLECULAR BEAM EPITAXY;
MORPHOLOGY;
NUCLEATION;
PLATINUM;
SPUTTER DEPOSITION;
SUPERSATURATION;
SURFACE ROUGHNESS;
THIN FILMS;
ADATOMS;
ION BEAM ASSISTED DEPOSITION (IBAD);
THERMAL ENERGY;
METALLIC FILMS;
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EID: 0031631072
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-528-179 Document Type: Conference Paper |
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Times cited : (6)
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References (19)
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