Microfabrication of crevice corrosion samples

Materials Research Society Symposium - Proceedings

Volumn 657, Issue , 2001, Pages EE5311-EE5316

  Wang, Xiaoyan ^a   Kelly, Robert G ^a   Lee, Jason S ^a   Reed, Michael L ^a  

^a University of Virginia   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMICAL ELECTRODES; ELECTRON BEAMS; ELECTROPLATING; MICROELECTROMECHANICAL DEVICES; PHOTORESISTS; SILICON WAFERS;

CREVICE CORROSION;

CORROSION PREVENTION;

EID: 0035557338     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)

1. High aspect ratio resist for thick film applications
2. High aspect ratio ultrathick, negative-tone near-UV photoresist and its applications for MEMS
3. SU-8: A low-cost negative resist for MEMS
4. High frequency transmission line using micromachined polymer dielectric