Micro-electro-mechanical-systems and industrial applications

American Society of Mechanical Engineers, Aerospace Division (Publication) AD

Volumn 52, Issue , 1996, Pages 761-767

  Möllendorf, Manfred ^a  

^a ROBERT BOSCH GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMOBILE MANUFACTURE; INDUSTRIAL APPLICATIONS; OPTICAL SENSORS; PARTIAL PRESSURE SENSORS; TELECOMMUNICATION EQUIPMENT;

INDUSTRIAL STAGE; MICRO-ELECTRO-MECHANICAL SYSTEMS; SURFACE MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 0030389039     PISSN: 07334230     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)

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5. Kress, H.-J.; Häckel, K; Schatz, O.; Muchow,J. "Integrated Silicon pressure sensor with on-chip compensation of temperature effects using programmable thyristors" Microsystems 1994.
6. Kress, H.-J.; Marek, J; Mast, M.; Schatz, O.; Muchow, J. "Integrated silicon pressure sensor for automotive applications with electronic trimming" Proc. SAE Int. Congr. 1995
7. Kuehnel W, Sherman S "A surface micromachined silicon accelerometer with on-chip detection circuitry", Sensors Actuators A 45 7-14, 1994
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10. Smith D.W. "Photonic Networking" NOC'96, June 25-28, Heidelberg, Germany