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Volumn 39, Issue SUPPL. Part 1, 2001, Pages

Characterization of a-SiNx:H/a-Si:H MIS structure using capacitance techniques

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0035542205     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (1)

References (16)
  • 1
    • 0004071496 scopus 로고
    • John Wiley & Sons, Inc., New York
    • D. K. Schroder, Semiconductor Material and Device Characterization (John Wiley & Sons, Inc., New York, 1990); N. F. Mott and E. A. Davis, Electronic Processes in Non-crystalline Materials (Clarendon Press, Oxford, 1979)
    • (1990) Semiconductor Material and Device Characterization
    • Schroder, D.K.1
  • 3
    • 0021547053 scopus 로고
    • edited by J. I. Pankove (Academic Press, New York)
    • J. D. Cohen, Semiconductor and Semimetals, edited by J. I. Pankove (Academic Press, New York, 1984), p. 9
    • (1984) Semiconductor and Semimetals , pp. 9
    • Cohen, J.D.1
  • 4
    • 0001520579 scopus 로고    scopus 로고
    • H. R. Park, D. Kwon and J. D. Cohen, J. Appl. Phys. 83, 8051 (1997); H. R. Park, S. H. Lee, J. R. Ryu and J. Jang, J. Korean Phys. Soc. 37, 272 (2000).
    • (1997) J. Appl. Phys. , vol.83 , pp. 8051
    • Park, H.R.1    Kwon, D.2    Cohen, J.D.3
  • 6
    • 0019539470 scopus 로고
    • P. Viktorovitch, J. Appl. Phys 52, 1392 (1981); M. Shur, M. Hack, J. G. Shaw and R. A. Martin, J. Appl. Phys. 66, 3381 (1989).
    • (1981) J. Appl. Phys , vol.52 , pp. 1392
    • Viktorovitch, P.1
  • 12
    • 0021411594 scopus 로고
    • G. Sasaki, S. Fujita and A. Sasaki, J. Appl. Phys. 55, 3183 (1984); A.V. Gelatos and J. Kanicki, Mat. Res. Soc. Symp. Proc. 149, 729 (1989).
    • (1984) J. Appl. Phys. , vol.55 , pp. 3183
    • Sasaki, G.1    Fujita, S.2    Sasaki, A.3
  • 14
    • 36549096529 scopus 로고
    • C. E. Michelson, A. V. Gelatos and J. D. Cohen, Appl. Phys. Lett. 47, 412 (1985); T. Unold, J. Hautala and J. D. Cohen, Phys. Rev. B 50, 16985 (1994); K. K. Mahavadi, K. Zellaman, J. D. Cohen and J. P. Harbison, Phys. Rev. B 35, 7776 (1987).
    • (1985) Appl. Phys. Lett. , vol.47 , pp. 412
    • Michelson, C.E.1    Gelatos, A.V.2    Cohen, J.D.3
  • 15
    • 0000958901 scopus 로고
    • C. E. Michelson, A. V. Gelatos and J. D. Cohen, Appl. Phys. Lett. 47, 412 (1985); T. Unold, J. Hautala and J. D. Cohen, Phys. Rev. B 50, 16985 (1994); K. K. Mahavadi, K. Zellaman, J. D. Cohen and J. P. Harbison, Phys. Rev. B 35, 7776 (1987).
    • (1994) Phys. Rev. B , vol.50 , pp. 16985
    • Unold, T.1    Hautala, J.2    Cohen, J.D.3
  • 16
    • 0001570241 scopus 로고
    • C. E. Michelson, A. V. Gelatos and J. D. Cohen, Appl. Phys. Lett. 47, 412 (1985); T. Unold, J. Hautala and J. D. Cohen, Phys. Rev. B 50, 16985 (1994); K. K. Mahavadi, K. Zellaman, J. D. Cohen and J. P. Harbison, Phys. Rev. B 35, 7776 (1987).
    • (1987) Phys. Rev. B , vol.35 , pp. 7776
    • Mahavadi, K.K.1    Zellaman, K.2    Cohen, J.D.3    Harbison, J.P.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.