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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 6, 2001, Pages 2773-2778

Plasma immersion ion cleaning of oxidized steel surfaces using hexafluoroethane and argon plasmas

(2) Peters, A M a Nastasi, M a

a LOS ALAMOS NATIONAL LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ARGON; DISSOCIATION; GLOW DISCHARGES; PLASMA ETCHING; PLASMAS; POSITIVE IONS; SPUTTER DEPOSITION; STAINLESS STEEL;

PLASMA IMMERSION ION CLEANING;

METAL CLEANING;

EID: 0035508839 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1403720 Document Type: Article

Times cited : (5)

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