Characterization of Ge-Sb-Te thin films deposited using a composition-spread approach

Thin Solid Films

Volumn 398-399, Issue , 2001, Pages 379-384

  Kyrsta, Stepan ^a   Cremer, Rainer ^a   Neuschütz, Dieter ^a   Laurenzis, Martin ^a   Bolivar, Peter Haring ^a   Kurz, Heinrich ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Combinatorial methods; Composition spread; Ge Sb Te; Physical vapor deposition

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CATHODES; CRYSTALLIZATION; GERMANIUM COMPOUNDS; MAGNETRON SPUTTERING; PHASE TRANSITIONS; PHOTODETECTORS; PHYSICAL VAPOR DEPOSITION; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SEMICONDUCTOR LASERS; ULTRAHIGH VACUUM; X RAY PHOTOELECTRON SPECTROSCOPY;

COMPOSITION-SPREAD APPROACH;

THIN FILMS;

EID: 0035506889     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01384-0     Document Type: Article

References (11)

1. Combinatorial and composition spread techniques in materials and device development