Characterization of inhomogeneous dielectric coatings with arbitrary refractive index profiles by multiple angle of incidence ellipsometry

Thin Solid Films

Volumn 397, Issue 1-2, 2001, Pages 17-23

  Tonova, Diana A ^a   Konova, Anka A ^a  

^a UNIVERSITY OF SOFIA   (Bulgaria)

Author keywords

Depth profiling; Ellipsometry; Optical coating

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; ELLIPSOMETRY; MATHEMATICAL MODELS; NONLINEAR EQUATIONS; OPTICAL COATINGS; REFRACTIVE INDEX;

DIELECTRIC COATINGS;

DIELECTRIC FILMS;

EID: 0035500212     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01400-6     Document Type: Article

References (20)