Investigation of the surface micro-roughness of fluoride films by spectroscopic ellipsometry

Thin Solid Films

Volumn 397, Issue 1-2, 2001, Pages 229-237

  Tikhonravov, A V ^a   Trubetskov, M K ^a   Krasilnikova, A V ^a   Masetti, E ^b   Duparre A ^c   Quesnel, E ^d   Ristau, D ^e  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

^b ENEA   (Italy)

^c FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^d CEA LETI   (France)

^e LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

Ellipsometry; Fluorides; Inhomogeneity; Surface roughness

Indexed keywords

ELLIPSOMETRY; FLUORINE COMPOUNDS; REFRACTIVE INDEX; SPECTROSCOPIC ANALYSIS; SUBSTRATES; SURFACE ROUGHNESS;

MULTILAYER COATINGS; SURFACE MICRO-ROUGHNESS;

THIN FILMS;

EID: 0035499309     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01421-3     Document Type: Article

References (24)

1. Optical Interference Coatings
2. Advances in optical interference coatings