Sensitivity of the ellipsometric angles Psi and Delta to the surface inhomogeneity

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3738, Issue , 1999, Pages 173-182

  Tikhonravov, A V ^a   Trubetskov, M K ^a   Masetti, E ^a   Krasilnikova, A V ^a   Kochikov, I V ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ELLIPSOMETRY; REFRACTIVE INDEX; SENSITIVITY ANALYSIS; SURFACE ROUGHNESS; THIN FILMS;

MICROROUGHNESS;

OPTICAL FILMS;

EID: 0032684565     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (5)