A novel contact/non-contact hybrid measurement system for surface topography characterization

International Journal of Machine Tools and Manufacture

Volumn 41, Issue 13-14, 2001, Pages 2001-2009

  Lu, Shengfeng ^a   Gao, Yongsheng ^b   Xie, Tiebang ^a   Xie, Feng ^a   Jiang, X Q ^a   Li, Zhu ^a   Wang, Fangmin ^c  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

^c Second Research Institute of the Public Security Ministry   (China)

Author keywords

Contact non contact measurement; Surface characterization; Surface topography

Indexed keywords

OPTICAL RESOLVING POWER; OPTICAL SENSORS; PROFILOMETRY; RELIABILITY;

HYBRID MANAGEMENT SYSTEM; SURFACE CHARACTERIZATION;

SURFACE TOPOGRAPHY;

EID: 0035479486     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0890-6955(01)00064-5     Document Type: Article

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