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Volumn 201, Issue 1-2, 1996, Pages 186-192

Roughness measurement by confocal microscopy for brightness characterization and surface waviness visibility evaluation

Author keywords

Aspect; Brightness measurement; Confocal microscopy; Image analysis; Roughness

Indexed keywords

CALCULATIONS; IMAGE ANALYSIS; LIGHT SCATTERING; MICROSCOPIC EXAMINATION; OPTICAL VARIABLES MEASUREMENT; SURFACE ROUGHNESS; SURFACE WAVES;

EID: 0030483809     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0043-1648(96)07240-7     Document Type: Article
Times cited : (23)

References (10)
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    • Beckmann, P.1
  • 4
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    • Vector scattering theory
    • J.M. Elson and J.M. Bennett, Vector scattering theory, Opt. Engng, 18 (1979) 116.
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    • Elson, J.M.1    Bennett, J.M.2
  • 5
    • 0020157359 scopus 로고
    • Surface profile measurement using the confocal microscope
    • D.K. Hamilton and T. Wilson, Surface profile measurement using the confocal microscope, J. Appl. Phys., 55(7) (1982) 5320-5322.
    • (1982) J. Appl. Phys. , vol.55 , Issue.7 , pp. 5320-5322
    • Hamilton, D.K.1    Wilson, T.2
  • 7
    • 0028421454 scopus 로고
    • Three dimensional image sensing by chromatic confocal microscopy
    • H. Tiziani and H.M. Hude, Three dimensional image sensing by chromatic confocal microscopy, Appl. Opt., 35(10) (1994) 1838-1843.
    • (1994) Appl. Opt. , vol.35 , Issue.10 , pp. 1838-1843
    • Tiziani, H.1    Hude, H.M.2
  • 8
    • 0042559044 scopus 로고
    • Vertical profiling, CD measurement, and 3D surface profiling with a confocal laser scanning microscope
    • T. Pomposo, D. Awamura and T. Ode, Vertical profiling, CD measurement, and 3D surface profiling with a confocal laser scanning microscope, Proc. Soc. Photo-Opt. Instrum. Engng, 1164 (1989) 191-202.
    • (1989) Proc. Soc. Photo-Opt. Instrum. Engng , vol.1164 , pp. 191-202
    • Pomposo, T.1    Awamura, D.2    Ode, T.3
  • 9
    • 0043059861 scopus 로고
    • Scatter properties of very rough surfaces: Application to brightness evaluation of usual objects
    • P. Sandoz and G. Tribillon, Scatter properties of very rough surfaces: application to brightness evaluation of usual objects, Proc. Soc. Photo-Opt. Instrum. Engng, 1995 (1993) 223-234.
    • (1993) Proc. Soc. Photo-Opt. Instrum. Engng , vol.1995 , pp. 223-234
    • Sandoz, P.1    Tribillon, G.2
  • 10
    • 0003369654 scopus 로고
    • Laser speckle and related phenomena
    • Springer, Berlin
    • J.C. Dainty, Laser speckle and related phenomena, Topics in Applied Physics, Vol. 9, Springer, Berlin, 1975.
    • (1975) Topics in Applied Physics , vol.9
    • Dainty, J.C.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.